Product ID:SILICON TETRAFLUORIDE
MSDS Date:Jan 24 1989
MSDS Number: EEENW
Kit Part:=== Responsible Party ===
Company Name:MATHESON TRI-GAS, INC.
Address:959 ROUTE 46 EAST
City:PARSIPPANY
State:NJ
ZIP:07054-0624
Country:US
Info Phone Num:(USA) 973-257-1100, (WHITBY) 905-668-3570, (EDMONTON)
780-471-4036
Chemtrec Ind/Phone:18004249300

Telephone: (USA) 973-257-1100, (WHITBY) 905-668-3570, (EDMONTON)

SILICON TETRAFLUORIDE

CAS: 7783-61-1

Fraction By Weight: 100.0%

Reports of Carcinogenicity:NTP:No IARC:No OSHA:No
Health Hazards Acute and Chronic:INHALATION: SHORT TERM EXPOSURE: burns
LONG TERM EXPOSURE: same as effects reported in short term exposure
SKIN CONTACT: SHORT TERM EXPOSURE: burns LONG TERM EXPOSURE: same
as effects reported in short term exposure EYE CONTACT: SHORT TERM
EXPOSURE: burns LONG TERM EXPOSURE: same as effects reported in
short term exposure INGESTION: SHORT TERM EXPOSURE: burns LONG TERM
EXPOSURE: same as effects reported in short term exposure
Medical Cond Aggravated by Exposure:

First Aid: INHALATION: If adverse effects occur, remove to
uncontaminated area. Give artificial respiration if not breathing.
If breathing is difficult, oxygen should be administered by
qualified personnel. Get immediate medical attention. SKIN CONTACT:
Wash skin with soap and water for at least 15 minutes while
removing contaminated clothing and shoes. Get immediate medical
attention. Thoroughly clean and dry contaminated clothing and shoes
before reuse. Destroy contaminated shoes. EYE CONTACT: Immediately
flush eyes with plenty of water for at least 15 minutes. Then get
immediate medical attention. INGESTION: If swallowed, drink plenty
of water, do NOT induce vomiting. Get immediate medical attention.
NOTE TO PHYSICIAN: For inhalation, consider oxygen. For skin
contact, consider ice water bath, iced alcohol, iced magnesium
sulfate, magnesium oxide/glycerin gels, calcium gluconate gel or
benzalkonium chloride solution. Avoid gastric lavage or emesis.

Flash Point:not flammable
Extinguishing Media:carbon dioxide, regular dry chemical Large fires:
Use regular foam or flood with fine water spray.
Fire Fighting Procedures:Move container from fire area if it can be
done without risk. Cool containers with water spray until well
after the fire is out. Stay away from the ends of tanks. Use
extinguishing agents appropriate for surrounding fire. Flood with
fine water spray. Avoid inhalation of material or combustion
by-products. Stay upwind and keep out of low areas.
Unusual Fire/Explosion Hazard:Negligible fire hazard. Pressurized
containers may rupture or explode if exposed to sufficient heat.

Spill Release Procedures:Do not touch spilled material. Stop leak if
possible without personal risk. Reduce vapors with water spray.
Small spills: Absorb with sand or other non-combustible material.
Collect spilled material in appropriate container for disposal.
Large spills: Dike for later disposal. Keep unnecessary people
away, isolate hazard area and deny entry.
Neutralizing Agent:

Handling and Storage Precautions:Store and handle in accordance with
all current regulations and standards. Subject to storage
regulations: U.S. OSHA 29 CFR 1910.101. Store below 52 C. Store in
a cool, dry place. Store in a well-ventilated area. Keep separated
from incompatible substances.
Other Precautions:

Respiratory Protection:The following respirators and maximum use
concentrations are drawn from NIOSH and/or OSHA. Measurement
Element: F 12.5 mg/m3 Any dust and mist respirator. 25 mg/m3 Any
dust and mist respirator. Any supplied-air respirator. 62.5 mg/m3
Any supplied-air respirator. Any powered, air-purifying respirator
with a dust and mist filter. May need acid gas sorbent. 125 mg/m3
Any air-purifying respirator with a full facepiece and a
high-efficiency particulate filter. May need acid gas sorbent. Any
self-contained breathing apparatus with a full facepiece. Any
supplied-air respirator with a full facepiece. 250 mg/m3 Any
supplied-air respirator with a full facepiece that is operated in a
pressure-demand or other positive-pressure mode. Escape - Any
air-purifying respirator with a full facepiece and a
high-efficiency particulate filter. May need acid gas sorbent. Any
appropriate escape-type, self-contained breathing apparatus. For
Unknown Concentrations or Immediately Dangerous to Life or Health -
Any supplied-air respirator with full facepiece and operated in a
pressure-demand or other positive-pressure mode in combination with
a separate escape supply. Any self-contained breathing apparatus
with a full facepiece.
Ventilation:Provide local exhaust or process enclosure ventilation
system. Ensure compliance with applicable exposure limits.
Protective Gloves:Wear appropriate chemical resistant gloves.
Eye Protection:Wear splash resistant safety goggles with a faceshield.
Provide an emergency eye wash fountain and quick drench shower in
the immediate work area.
Other Protective Equipment:Wear appropriate chemical resistant
clothing.
Supplemental Safety and Health
SILICON TETRAFLUORIDE: 2.5 mg(F)/m3 OSHA TWA 2.5 mg(F)/m3 ACGIH TWA
2.5 mg(F)/m3 NIOSH recommended TWA 10 hour(s)

Boiling Pt:-123 F (-86 C)
Melt/Freeze Pt:-130 F (-90 C)
Vapor Pres:Not available
Vapor Density:3.63
Spec Gravity:1.7 @ -95 C
pH:acidic in solution
Evaporation Rate & Reference:Not applicable
Solubility in Water:decomposes
Appearance and Odor:PHYSICAL STATE:gas COLOR:colorless ODOR:irritating
odor, pungent odor
Corrosion Rate:

Stability Indicator/Materials to Avoid:Reacts violently with water,
releasing toxic gases. Releases corrosive gases.
Stability Condition to Avoid:Avoid heat, flames, sparks and other
sources of ignition. May ignite or explode on contact with
combustible materials.
Hazardous Decomposition Products:Thermal decomposition products or
contact with water or moisture: acids, hydrogen fluoride Thermal
decomposition products or contact with water or moisture: acids,
hydrogen fluoride
Conditions to Avoid Polymerization:Will not polymerize.

Waste Disposal Methods:Dispose in accordance with all applicable
regulations.

Toxicological Information:SILICON TETRAFLUORIDE: TOXICITY DATA: 2272
ppm inhalation-rat LC50 LOCAL EFFECTS: Corrosive: inhalation, skin,
eye, ingestion ACUTE TOXICITY LEVEL: Moderately Toxic: inhalation
MEDICAL CONDITIONS AGGRAVATED BY EXPOSURE: central nervous system
disorders, bone, joint or tooth disorders, eye disorders, kidney
disorders, respiratory disorders, skin disorders and allergies
ADDITIONAL DATA: May cross the placenta. May be excreted in breast
milk.

Disclaimer (provided with this information by the compiling agencies):
This information is formulated for use by elements of the Department
of Defense. The United States of America in no manner whatsoever,
expressly or implied, warrants this information to be accurate and
disclaims all liability for its use. Any person utilizing this
document should seek competent professional advice to verify and
assume responsibility for the suitability of this information to their
particular situation.

Ecological:Not available

Transport Information:U.S. DOT 49 CFR 172.101: PROPER SHIPPING NAME:
Silicon tetrafluoride, compressed ID NUMBER: UN1859 HAZARD CLASS OR
DIVISION: 2.3 LABELING REQUIREMENTS: Poison gas; Corrosive QUANTITY
LIMITATIONS: PASSENGER AIRCRAFT OR RAILCAR: Forbidden CARGO
AIRCRAFT ONLY: Forbidden

SARA Title III Information: SARA TITLE III SECTION 302 EXTREMELY
HAZARDOUS SUBSTANCES (40 CFR 355.30): Not regulated. SARA TITLE
III SECTION 304 EXTREMELY HAZARDOUS SUBSTANCES (40 CFR 355.40): Not
regulated. SARA TITLE III SARA SECTIONS 311/312 HAZARDOUS
CATEGORIES (40 CFR 370.21): ACUTE: Yes CHRONIC: Yes FIRE: No
REACTIVE: Yes SUDDEN RELEASE: Yes SARA TITLE III SECTION 313 (40
CFR 372.65): Not regulated.
Federal Regulatory Information:CERCLA SECTIONS 102a/103 HAZARDOUS
SUBSTANCES (40 CFR 302.4): Not regulated. OSHA PROCESS SAFETY
(29CFR1910.119): Not regulated.
State Regulatory Information: California Proposition 65: Not regulated.